Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12333287 | Systems and/or methods for simplifying packaging and installation of software in mainframe computer systems | Arunkumaar Ramachandran | 2025-06-17 |
| 7687783 | Multi-beam deflector array device for maskless particle-beam processing | Elmar Platzgummer, Hans Loschner, Samuel Kvasnica, Mathias Irmscher, Florian Letzkus +1 more | 2010-03-30 |
| 6864182 | Method of producing large-area membrane masks by dry etching | Jörg Butschke, Albrecht Ehrmann, Karl Kragler, Florian Letzkus, Christian Reuter | 2005-03-08 |
| 6835508 | Large-area membrane mask and method for fabricating the mask | Jörg Butschke, Albrecht Ehrmann, Ernst Haugeneder, Frank-Michael Kamm, Florian Letzkus +1 more | 2004-12-28 |
| 6696371 | Method for fabricating positionally exact surface-wide membrane masks | Joerg Butschke, Albrecht Ehrmann, Ernst Haugeneder, Florian Letzkus | 2004-02-24 |
| 6455429 | Method of producing large-area membrane masks | Jörg Butschke, Florian Letzkus, Elisabeth Penteker, Bernd Hofflinger, Hans Loschner | 2002-09-24 |
| 6002466 | Lithography exposure device | Uwe Brauch, Hans Opower, Bernd Hoefflinger | 1999-12-14 |