Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8811665 | Processing system | Klaus Juenger | 2014-08-19 |
| 8314921 | Exposure apparatus | — | 2012-11-20 |
| 8248581 | Exposure system | Stefan Scharl | 2012-08-21 |
| 8027018 | Method and device for producing exposed structures | Stefan Scharl, Dirk Leinenbach | 2011-09-27 |
| 7705967 | Exposure system | Stefan Scharl | 2010-04-27 |
| 7652750 | Lithography exposure device having a plurality of radiation sources | Stefan Scharl | 2010-01-26 |
| 7019818 | Apparatus for exposing substrate materials | Stefan Scharl | 2006-03-28 |
| 6859261 | Lithography exposure device | Stefan Scharl | 2005-02-22 |
| 6741225 | Device for generating an image | Uwe Brauch | 2004-05-25 |
| 6586169 | Lithography exposure device and lithography process | Uwe Brauch | 2003-07-01 |
| 6570896 | Laser radiation source and process for generating a coherent total laser radiation field | Norbert Bissinger, Uwe Brauch, Guido Hergenhan, Marcus Scholl, Bernd Luecke +1 more | 2003-05-27 |
| 6157755 | Laser system | Uwe Brauch, Adolf Giesen | 2000-12-05 |
| 6013130 | Process and device for the production of epitaxial layers | Ralph Dieter, Heinrich Weyer | 2000-01-11 |
| 6002466 | Lithography exposure device | Uwe Brauch, Bernd Hoefflinger, Reinhard Springer | 1999-12-14 |
| 5936993 | Laser system | Rolf Nowack | 1999-08-10 |
| 5874929 | Apparatus for producing an image | Uwe Becker, Uwe Brauch | 1999-02-23 |
| 5862278 | Laser system | Uwe Brauch, Helmut Huegel, Adolf Giesen | 1999-01-19 |
| 5818546 | Apparatus for imaging exit spots of a laser array | Uwe Becker, Uwe Brauch | 1998-10-06 |
| 5736464 | Process and apparatus for producing a functional structure of a semiconductor component | — | 1998-04-07 |
| 5729568 | Power-controlled, fractal laser system | Helmut Huegel, Adolf Giesen, Friedrich Dausinger | 1998-03-17 |
| 5725914 | Process and apparatus for producing a functional structure of a semiconductor component | — | 1998-03-10 |
| 5528619 | Gas discharge structure | Hansjoerg Bochum, Rolf Nowack, Wolfram Schock, Klaus Wessel | 1996-06-18 |
| 5513195 | Phase-controlled, fractal laser system | Helmut Huegel, Adolf Giesen | 1996-04-30 |
| 5492861 | Process for applying structured layers using laser transfer | — | 1996-02-20 |
| 5373525 | Wave guide laser having a resonator mirror with successive reflecting segments and out coupling openings arranged in an azimuthal direction | Rolf Nowack | 1994-12-13 |