Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338183 | Method for integrally bonding a glass element to a support element, and optical device | Jochen Taubert | 2025-06-24 |
| 11712753 | Method for making a thermally stable connection between a glass element and a support element, method for producing an optical device, and optical device | — | 2023-08-01 |
| 8154000 | Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources | Diethard Kloepfel, Todd Byrnes, Elma Weber, Mike Möritz | 2012-04-10 |
| 8008595 | Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge | Christian Ziener | 2011-08-30 |
| 7812542 | Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge | Christian Ziener, Mike Moeritz | 2010-10-12 |
| 7800086 | Arrangement for radiation generation by means of a gas discharge | Christian Ziener, Frank Flohrer, Juergen Kleinschmidt | 2010-09-21 |
| 7649187 | Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated | Christian Ziener, Frank Flohrer | 2010-01-19 |
| 7531820 | Arrangement and method for the generation of extreme ultraviolet radiation | Christian Ziener, Juergen Kleinschmidt | 2009-05-12 |
| 7477673 | Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge | Christian Ziener, Frank Flohrer, Carsten Thode | 2009-01-13 |
| 7405413 | Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation | Christian Ziener, Kai Gaebel | 2008-07-29 |
| 7372057 | Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation | Kai Gaebel, Diethard Kloepfel | 2008-05-13 |
| 7368742 | Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation | Diethard Kloepfel | 2008-05-06 |
| 7274030 | Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma | Christian Ziener, Kai Gaebel | 2007-09-25 |
| 7250621 | Method and arrangement for the plasma-based generation of intensive short-wavelength radiation | Kai Gaebel, Christian Ziener | 2007-07-31 |
| 7233013 | Radiation source for the generation of short-wavelength radiation | Kai Gaebel, Thomas Brauner | 2007-06-19 |
| 7218651 | Arrangement for the generation of a pulsed laser beam of high average output | Christian Ziener, Kai Gaebel | 2007-05-15 |
| 7161163 | Method and arrangement for the plasma-based generation of soft x-radiation | Kai Gaebel, Christian Ziener | 2007-01-09 |
| 7122814 | Arrangement for the stabilization of the radiation emission of a plasma | Christian Ziener, Kai Gaebel | 2006-10-17 |
| 6995382 | Arrangement for the generation of intensive short-wave radiation based on a plasma | Christian Ziener, Kai Gaebel | 2006-02-07 |
| 6947227 | Positioning device | — | 2005-09-20 |
| 6570896 | Laser radiation source and process for generating a coherent total laser radiation field | Norbert Bissinger, Uwe Brauch, Hans Opower, Marcus Scholl, Bernd Luecke +1 more | 2003-05-27 |