Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8154000 | Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources | Guido Hergenhan, Diethard Kloepfel, Todd Byrnes, Mike Möritz | 2012-04-10 |