Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8154000 | Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources | Guido Hergenhan, Todd Byrnes, Elma Weber, Mike Möritz | 2012-04-10 |
| 7599470 | Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination | Kai Gaebel | 2009-10-06 |
| 7372057 | Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation | Kai Gaebel, Guido Hergenhan | 2008-05-13 |
| 7368742 | Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation | Guido Hergenhan | 2008-05-06 |