Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7599470 | Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination | Diethard Kloepfel | 2009-10-06 |
| 7476884 | Device and method for generating extreme ultraviolet (EUV) radiation | Juergen Kleinschmidt | 2009-01-13 |
| 7405413 | Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation | Guido Hergenhan, Christian Ziener | 2008-07-29 |
| 7372057 | Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation | Diethard Kloepfel, Guido Hergenhan | 2008-05-13 |
| 7329014 | Collector mirror for plasma-based, short-wavelength radiation sources | Istvan Balogh | 2008-02-12 |
| 7274030 | Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma | Guido Hergenhan, Christian Ziener | 2007-09-25 |
| 7250621 | Method and arrangement for the plasma-based generation of intensive short-wavelength radiation | Christian Ziener, Guido Hergenhan | 2007-07-31 |
| 7233013 | Radiation source for the generation of short-wavelength radiation | Guido Hergenhan, Thomas Brauner | 2007-06-19 |
| 7218651 | Arrangement for the generation of a pulsed laser beam of high average output | Guido Hergenhan, Christian Ziener | 2007-05-15 |
| 7161163 | Method and arrangement for the plasma-based generation of soft x-radiation | Guido Hergenhan, Christian Ziener | 2007-01-09 |
| 7122814 | Arrangement for the stabilization of the radiation emission of a plasma | Guido Hergenhan, Christian Ziener | 2006-10-17 |
| 6995382 | Arrangement for the generation of intensive short-wave radiation based on a plasma | Christian Ziener, Guido Hergenhan | 2006-02-07 |
| 6882704 | Radiation source for generating extreme ultraviolet radiation | Guido Schriever, Uwe Stamm | 2005-04-19 |