Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7329014 | Collector mirror for plasma-based, short-wavelength radiation sources | Kai Gaebel | 2008-02-12 |
| 5521764 | Device for lateral adjustment of lenses in a high-performance lens system | Joerg-Peter Schmidt | 1996-05-28 |