Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10534152 | Method for producing an optical element comprising micro-optical structures, arrangement and membrane unit | — | 2020-01-14 |
| 8008595 | Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge | Guido Hergenhan | 2011-08-30 |
| 7812542 | Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge | Guido Hergenhan, Mike Moeritz | 2010-10-12 |
| 7800086 | Arrangement for radiation generation by means of a gas discharge | Guido Hergenhan, Frank Flohrer, Juergen Kleinschmidt | 2010-09-21 |
| 7649187 | Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated | Guido Hergenhan, Frank Flohrer | 2010-01-19 |
| 7531820 | Arrangement and method for the generation of extreme ultraviolet radiation | Guido Hergenhan, Juergen Kleinschmidt | 2009-05-12 |
| 7477673 | Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge | Guido Hergenhan, Frank Flohrer, Carsten Thode | 2009-01-13 |
| 7405413 | Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation | Guido Hergenhan, Kai Gaebel | 2008-07-29 |
| 7274030 | Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma | Guido Hergenhan, Kai Gaebel | 2007-09-25 |
| 7250621 | Method and arrangement for the plasma-based generation of intensive short-wavelength radiation | Kai Gaebel, Guido Hergenhan | 2007-07-31 |
| 7218651 | Arrangement for the generation of a pulsed laser beam of high average output | Guido Hergenhan, Kai Gaebel | 2007-05-15 |
| 7161163 | Method and arrangement for the plasma-based generation of soft x-radiation | Kai Gaebel, Guido Hergenhan | 2007-01-09 |
| 7122814 | Arrangement for the stabilization of the radiation emission of a plasma | Guido Hergenhan, Kai Gaebel | 2006-10-17 |
| 6995382 | Arrangement for the generation of intensive short-wave radiation based on a plasma | Kai Gaebel, Guido Hergenhan | 2006-02-07 |