Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7477673 | Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge | Christian Ziener, Guido Hergenhan, Frank Flohrer | 2009-01-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7477673 | Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge | Christian Ziener, Guido Hergenhan, Frank Flohrer | 2009-01-13 |