Issued Patents All Time
Showing 25 most recent of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11267847 | Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3 | Florian Sonntag, Markus Hoerer, Kerstin Pino Tossi | 2022-03-08 |
| 10344057 | Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3 | Florian Sonntag, Markus Hoerer, Kerstin Pino Tossi | 2019-07-09 |
| 9464119 | Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3 | Florian Sonntag, Markus Hoerer, Kerstin Lux | 2016-10-11 |
| 9170505 | Arrangement for generating EUV radiation | Vladimir Korobochko | 2015-10-27 |
| 8975543 | Electrical terminal module | Frank Hakemeyer, Christian Starke | 2015-03-10 |
| 8610354 | Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge | Max Christian Schuermann, Lutz Dippmann, Guido Schriever | 2013-12-17 |
| 8546775 | Method and arrangement for the stabilization of the source location of the generation of extreme ultraviolet (EUV) radiation based on a discharge plasma | — | 2013-10-01 |
| 8426834 | Method and apparatus for the generation of EUV radiation from a gas discharge plasma | — | 2013-04-23 |
| 8410422 | Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma | Denis Bolshukhin, Alexander Keller, Max Christian Schuermann, Guido Schriever, Imtiaz Ahmad | 2013-04-02 |
| 7974321 | Method and arrangement for stabilizing the average emitted radiation output of a pulsed radiation source | Jesko Brudermann | 2011-07-05 |
| D626516 | Adjusting device for the setpoint of an electric module | Frank Hakemeyer, Christian Starke | 2010-11-02 |
| 7800086 | Arrangement for radiation generation by means of a gas discharge | Christian Ziener, Guido Hergenhan, Frank Flohrer | 2010-09-21 |
| 7755070 | Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source | René De Bruijn, Chinh Duc Tran, Bjoern Mader, Jesko Brudermann | 2010-07-13 |
| 7595594 | Arrangement for switching high electric currents by a gas discharge | Vladimir Korobochko, Alexander Keller | 2009-09-29 |
| 7541604 | Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housings | Sven Goetze, Harald Ebel, Imtiaz Ahmad | 2009-06-02 |
| 7531820 | Arrangement and method for the generation of extreme ultraviolet radiation | Guido Hergenhan, Christian Ziener | 2009-05-12 |
| 7488962 | Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma | Vladimir Korobochko, Alexander Keller | 2009-02-10 |
| 7476884 | Device and method for generating extreme ultraviolet (EUV) radiation | Kai Gaebel | 2009-01-13 |
| 7414253 | EUV radiation source with high radiation output based on a gas discharge | Jens Ringling, Alexander Geier | 2008-08-19 |
| 7365350 | Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma | Duc Tran, Jesko Brudermann, Bjoern Mader, René De Bruijn | 2008-04-29 |
| 7266137 | Laser gas replenishment method | Hans-Stephan Albrecht, Klaus Vogler, Thomas Schroeder, Igor Bragin, Vadim Berger +3 more | 2007-09-04 |
| 7079224 | Arrangement for debris reduction in a radiation source based on a plasma | Duc Tran | 2006-07-18 |
| 7075963 | Tunable laser with stabilized grating | Dirk Basting, Wolfgang Zschocke, Thomas Schroeder, Matthias Kramer, Uwe Stamm | 2006-07-11 |
| 7072370 | Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources | Vladimir Korobochko, Denis Bolshukhin, Lutz Dippmann, Spencer Merz, Hubertus Von Bergmann | 2006-07-04 |
| 7006541 | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp | Peter Lokai, Thomas Schroeder, Uwe Stamm, Klaus Vogler | 2006-02-28 |