Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9421647 | Method of manufacturing mirror shells of a nested shells grazing incidence mirror | Christof Metzmacher | 2016-08-23 |
| 8686372 | Method for the spatially resolved measurement of parameters in a cross section of a beam bundle of high-energy radiation of high intensity | Thomas Missalla, Denis Bolshukhin, Boris Tkachenko | 2014-04-01 |
| 8610354 | Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge | Lutz Dippmann, Juergen Kleinschmidt, Guido Schriever | 2013-12-17 |
| 8410422 | Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma | Denis Bolshukhin, Alexander Keller, Guido Schriever, Imtiaz Ahmad, Juergen Kleinschmidt | 2013-04-02 |
| 7328885 | Plasma radiation source and device for creating a gas curtain for plasma radiation sources | Bernd Seher, Lutz Mueller, Thomas Missalla | 2008-02-12 |
| 7329876 | Narrow-band transmission filter for EUV radiation | Thomas Missalla | 2008-02-12 |