Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292690 | Insert for a source chamber of an EUV radiation source | Michael Hagg, Juan Jose Hasbun Wood, Iris Pilch | 2025-05-06 |
| 11550225 | EUV radiation source, insert for an EUV radiation source and insert for an insert for an EUV radiation source | Iris Pilch, Juan Jose Hasbun Wood, Michael Hagg | 2023-01-10 |
| 9897724 | Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity | Peter Zink, Rolf Theo Anton Apetz | 2018-02-20 |
| 9599812 | Foil trap and light source device using such foil trap | Hermann Giese, Achim Weber, Hironobu Yabuta, Rolf Theo Anton Apetz, Tatsushi Igarashi +2 more | 2017-03-21 |
| 9421647 | Method of manufacturing mirror shells of a nested shells grazing incidence mirror | Max Christian Schuermann | 2016-08-23 |
| 9110390 | Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity | Peter Zink, Rolf Theo Anton Apetz | 2015-08-18 |
| 8891058 | Extreme UV radiation generating device comprising a contamination captor | Achim Weber | 2014-11-18 |
| 8749178 | Electrode system, in particular for gas discharge light sources | Jeroen Jonkers, Rolf Theo Anton Apetz | 2014-06-10 |
| 8721778 | Foil trap device with improved heat resistance | Michael Schaaf, Peter Klaus Bachmann | 2014-05-13 |
| 8693090 | Extreme UV radiation reflecting element comprising a sputter-resistant material | — | 2014-04-08 |
| 8519367 | Extreme UV radiation generating device comprising a corrosion-resistant material | Achim Weber | 2013-08-27 |
| 8097092 | Method of cleaning and after treatment of optical surfaces in an irradiation unit | Guenther Hans Derra, Thomas Kruecken, Achim Weber, Peter Zink | 2012-01-17 |
| 8076655 | Method of cleaning optical surfaces of an irradiation unit in a two-step process | Guenther Hans Derra, Thomas Kruecken, Achim Weber, Peter Zink | 2011-12-13 |
| 8049188 | Method of cleaning a surface region covered with contaminant or undesirable material | Achim Weber | 2011-11-01 |
| 7466213 | Resonator structure and method of producing it | Hans-Peter Löbl, Robert F. Milsom | 2008-12-16 |
| 7119637 | Filter system comprising a bulk acoustic wave resonator | Hans-Peter Loebl, Mareike Klee, Robert F. Milsom, Wolfgang Brand | 2006-10-10 |
| 6975182 | Filter system with bulk wave resonator having a reflection layer composition that varies with the layer thickness | Hans-Peter Loebl, Mareike Klee, Robert F. Milsom, Wolfgang Brand | 2005-12-13 |