Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10933539 | Gripping devices and methods for making the same | Douglas P. Holmes, Yi Yang | 2021-03-02 |
| 9897724 | Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity | Christof Metzmacher, Rolf Theo Anton Apetz | 2018-02-20 |
| 9110390 | Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity | Christof Metzmacher, Rolf Theo Anton Apetz | 2015-08-18 |
| 8945310 | Method and device for cleaning at least one optical component | Joseph Pankert, Guenther Hans Derra, Achim Weber | 2015-02-03 |
| 8519368 | Method and device for generating EUV radiation or soft X-rays | Jakob Willi Neff, Dominik Marcel Vaudrevange | 2013-08-27 |
| 8101930 | Method of increasing the operation lifetime of a collector optics arranged in an irradiation device | — | 2012-01-24 |
| 8097092 | Method of cleaning and after treatment of optical surfaces in an irradiation unit | Guenther Hans Derra, Thomas Kruecken, Christof Metzmacher, Achim Weber | 2012-01-17 |
| 8076655 | Method of cleaning optical surfaces of an irradiation unit in a two-step process | Guenther Hans Derra, Thomas Kruecken, Christof Metzmacher, Achim Weber | 2011-12-13 |
| 7809112 | Method and device for generating EUV radiation and/or soft X-ray radiation | Gunther Hans Derra, Rolf Theo Anton Apetz, Willi Neff, Oliver Rosier | 2010-10-05 |
| 7732789 | Optical system having a cleaning arrangement | Gunther Hans Derra | 2010-06-08 |
| 7460646 | Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma | — | 2008-12-02 |
| 4914895 | Device for filling and closing sacks, in particular paper side folding sacks | Gustav Kuckhermann, Klaus Tolle, Eduard Turnwald, Rainer Schafer, Josef Hodapp | 1990-04-10 |