Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8945310 | Method and device for cleaning at least one optical component | Peter Zink, Guenther Hans Derra, Achim Weber | 2015-02-03 |
| 7397190 | Gas discharge lamp for extreme UV radiation | Guenther Hans Derra, Willi Neff, Klaus Bergmann, Jeroen Jonkers | 2008-07-08 |
| 7126143 | Method and device for producing extreme ultraviolet radiation and soft x-ray radiation | Jurgen Klein, Willi Neff, Stefan Seiwart, Klaus Bergmann, Michael R. Loken | 2006-10-24 |
| 6967341 | Method and device for the generation of far ultraviolet or soft x-ray radiation | Willi Neff, Klaus Bergmann, Oliver Rosier | 2005-11-22 |