Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10159113 | Heating system comprising semiconductor light sources | Holger Moench, Stephan Gronenborn, Pavel Pekarski, Johanna Sophie Kolb, Ralf Conrads | 2018-12-18 |
| 8945310 | Method and device for cleaning at least one optical component | Peter Zink, Joseph Pankert, Achim Weber | 2015-02-03 |
| 8368305 | Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation | Vladzimir Zhokhavets, Thomas Kruecken | 2013-02-05 |
| 8338797 | Debris mitigation device with rotating foil trap and drive assembly | Michael Schaaf | 2012-12-25 |
| 8097092 | Method of cleaning and after treatment of optical surfaces in an irradiation unit | Thomas Kruecken, Christof Metzmacher, Achim Weber, Peter Zink | 2012-01-17 |
| 8076655 | Method of cleaning optical surfaces of an irradiation unit in a two-step process | Thomas Kruecken, Christof Metzmacher, Achim Weber, Peter Zink | 2011-12-13 |
| 8040033 | Electrode device for gas discharge sources and method of operating a gas discharge source having this electrode device | Uladzimir Zhokhavets, Thomas Kruecken | 2011-10-18 |
| 7397190 | Gas discharge lamp for extreme UV radiation | Joseph Pankert, Willi Neff, Klaus Bergmann, Jeroen Jonkers | 2008-07-08 |
| 7385211 | Method of generating extreme ultraviolet radiation | Ulrich Niemann | 2008-06-10 |
| 6563267 | High-pressure discharge lamp having seal with external antenna | Hubertus Cornelis Maria Van Den Nieuwenhuizen, Dirk Vanderhaeghen, Johannes Martinus De Regt, Antoon Joseph Bock | 2003-05-13 |
| 6552499 | High-pressure gas discharge lamp, and method of manufacturing same | Hanns E. Fischer, Dieter Leers, Holger Moench | 2003-04-22 |