Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7809112 | Method and device for generating EUV radiation and/or soft X-ray radiation | Gunther Hans Derra, Rolf Theo Anton Apetz, Oliver Rosier, Peter Zink | 2010-10-05 |
| 7734014 | Extreme UV and soft X ray generator | Klaus Bergmann | 2010-06-08 |
| 7518300 | Method and device for the generation of a plasma through electric discharge in a discharge space | Eric Gerardus Theodoor Bosch, Jeroen Jonkers, Gunther Hans Derra | 2009-04-14 |
| 7427766 | Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation | Jeroen Jonkers, Dominik Marcel Vaudrevange | 2008-09-23 |
| 7397190 | Gas discharge lamp for extreme UV radiation | Guenther Hans Derra, Joseph Pankert, Klaus Bergmann, Jeroen Jonkers | 2008-07-08 |
| 7126143 | Method and device for producing extreme ultraviolet radiation and soft x-ray radiation | Jurgen Klein, Stefan Seiwart, Klaus Bergmann, Joseph Pankert, Michael R. Loken | 2006-10-24 |
| 6967341 | Method and device for the generation of far ultraviolet or soft x-ray radiation | Klaus Bergmann, Oliver Rosier, Joseph Pankert | 2005-11-22 |
| 6788763 | Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge | Rainer Lebert, Klaus Bergmann, Oliver Rosier | 2004-09-07 |
| 6461409 | Device and method for treating flowing gases, in particular exhaust gases | Klaus Pochner, Franz-Josef Trompeter, Jens Kamp | 2002-10-08 |
| 6389106 | Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge | Rainer Lebert, Guido Schriever, Klaus Bergmann | 2002-05-14 |
| 6269631 | Process and device for operating an internal combustion engine with less pollutant emission | Klaus Pochner, Gerhard Lepperhoff, Georg Lutkemeyer | 2001-08-07 |
| 5698039 | Process for cleaning a substrate using a barrier discharge | Ulrich Patz, Michael Scherer, Klaus Pochner | 1997-12-16 |
| 5023897 | Device for generating X-radiation with a plasma source | Raymond Holz, Rainer Lebert, Franz Richter | 1991-06-11 |
| 4596030 | Apparatus for generating a source of plasma with high radiation intensity in the X-ray region | Gerd Herziger | 1986-06-17 |