Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897724 | Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity | Peter Zink, Christof Metzmacher | 2018-02-20 |
| 9599812 | Foil trap and light source device using such foil trap | Christof Metzmacher, Hermann Giese, Achim Weber, Hironobu Yabuta, Tatsushi Igarashi +2 more | 2017-03-21 |
| 9110390 | Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity | Peter Zink, Christof Metzmacher | 2015-08-18 |
| 8749178 | Electrode system, in particular for gas discharge light sources | Christof Metzmacher, Jeroen Jonkers | 2014-06-10 |
| 7809112 | Method and device for generating EUV radiation and/or soft X-ray radiation | Gunther Hans Derra, Willi Neff, Oliver Rosier, Peter Zink | 2010-10-05 |
| 7799136 | Method of cleaning at least one surface of an optical device disposed in a vacuum chamber | — | 2010-09-21 |
| 7396792 | Transparent polycrystalline aluminium oxide | Michel Paul Barbara Van Bruggen, Theo Arnold Kop, Andreas Krell, Thomas Hutzler | 2008-07-08 |