Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399437 | Debris mitigation device and light source apparatus including the same | Noritaka Ashizawa | 2025-08-26 |
| 12321107 | Extreme ultraviolet light source device and protection method for receiving plate member | Nobuaki Miyagawa | 2025-06-03 |
| 11822258 | Foil trap and light source apparatus including the same | — | 2023-11-21 |
| 11774856 | Extreme ultraviolet light source device | Hajime Kikuiri | 2023-10-03 |
| 9599812 | Foil trap and light source device using such foil trap | Christof Metzmacher, Hermann Giese, Achim Weber, Rolf Theo Anton Apetz, Tatsushi Igarashi +2 more | 2017-03-21 |
| 9572240 | Light source apparatus | Gota Niimi | 2017-02-14 |
| 7705334 | Extreme ultraviolet radiation source device | Takahiro Shirai | 2010-04-27 |
| 7479645 | Device for producing extreme UV radiation | Taku Sumitomo | 2009-01-20 |
| 7459708 | Extreme UV radiation source device and method for eliminating debris which forms within the device | Masaki Inoue, Taku Sumitomo, Kyohei Seki, Masaki Yoshioka | 2008-12-02 |