Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940736 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yoshifumi Ueno, Shinji Nagai | 2024-03-26 |
| 11145429 | Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device | Atsushi Ueda, Georg Soumagne | 2021-10-12 |
| 10591342 | Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device | Akihisa Nagano | 2020-03-17 |
| 9686846 | Extreme UV radiation light source device | Yusuke Teramoto, Takahiro Hiraoka, Pieter Goldhoorn | 2017-06-20 |
| 9581392 | Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type | Dominik Marcel Vaudrevange, Ralf Conrads, Maghiel Jan Kole | 2017-02-28 |
| 9572240 | Light source apparatus | Hironobu Yabuta | 2017-02-14 |
| 9480136 | Extreme UV radiation light source device | Yusuke Teramoto, Takahiro Hiraoka, Pieter Goldhoorn | 2016-10-25 |
| 9202659 | Arrangement and method for cooling a plasma-based radiation source | Dominik Marcel Vaudrevange, Ralf Conrads, Maghiel Jan Kole, Wilhelmus V. J. Van Nunspeet, Johannes Wilhelmus Jacobus Leonardus Cuijpers +1 more | 2015-12-01 |
| 7482740 | Electrode unit of extreme ultraviolet generator | — | 2009-01-27 |