Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10609802 | High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatus | Daiki Yamatani | 2020-03-31 |
| 10591342 | Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device | Gota Niimi | 2020-03-17 |
| 10285253 | Discharge electrodes and light source device | Yusuke Teramoto, Hideyuki URAKAMI | 2019-05-07 |
| 10143075 | Device for emitting extreme ultraviolet light | Yusuke Teramoto, Hideyuki URAKAMI | 2018-11-27 |