Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10609802 | High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatus | Akihisa Nagano | 2020-03-31 |
| 8841625 | Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device | — | 2014-09-23 |
| 8785893 | Extreme ultraviolet light source and positioning method of light focusing optical means | — | 2014-07-22 |
| 6982421 | Extreme ultraviolet source | Hiroto Sato, Kazunori Bessho, Yusuke Teramoto | 2006-01-03 |