Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12414218 | Light source apparatus | — | 2025-09-09 |
| 12308200 | Light source apparatus | — | 2025-05-20 |
| 12250762 | Light source apparatus | — | 2025-03-11 |
| 10672584 | X-ray generator | Takahiro Shirai | 2020-06-02 |
| 10285253 | Discharge electrodes and light source device | Akihisa Nagano, Hideyuki URAKAMI | 2019-05-07 |
| 10143075 | Device for emitting extreme ultraviolet light | Hideyuki URAKAMI, Akihisa Nagano | 2018-11-27 |
| 9686846 | Extreme UV radiation light source device | Gota Niimi, Takahiro Hiraoka, Pieter Goldhoorn | 2017-06-20 |
| 9480136 | Extreme UV radiation light source device | Gota Niimi, Takahiro Hiraoka, Pieter Goldhoorn | 2016-10-25 |
| 7626188 | Light source device for producing extreme ultraviolet radiation and method of generating extreme ultraviolet radiation | Takahiro Shirai, Hiroto Sato, Kazunori Bessho | 2009-12-01 |
| 6982421 | Extreme ultraviolet source | Hiroto Sato, Kazunori Bessho, Daiki Yamatani | 2006-01-03 |