Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7626188 | Light source device for producing extreme ultraviolet radiation and method of generating extreme ultraviolet radiation | Takahiro Shirai, Hiroto Sato, Yusuke Teramoto | 2009-12-01 |
| 6982421 | Extreme ultraviolet source | Hiroto Sato, Yusuke Teramoto, Daiki Yamatani | 2006-01-03 |