Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581392 | Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type | Gota Niimi, Dominik Marcel Vaudrevange, Ralf Conrads | 2017-02-28 |
| 9202659 | Arrangement and method for cooling a plasma-based radiation source | Gota Niimi, Dominik Marcel Vaudrevange, Ralf Conrads, Wilhelmus V. J. Van Nunspeet, Johannes Wilhelmus Jacobus Leonardus Cuijpers +1 more | 2015-12-01 |