Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581392 | Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type | Gota Niimi, Ralf Conrads, Maghiel Jan Kole | 2017-02-28 |
| 9202659 | Arrangement and method for cooling a plasma-based radiation source | Gota Niimi, Ralf Conrads, Maghiel Jan Kole, Wilhelmus V. J. Van Nunspeet, Johannes Wilhelmus Jacobus Leonardus Cuijpers +1 more | 2015-12-01 |
| 8519368 | Method and device for generating EUV radiation or soft X-rays | Jakob Willi Neff, Peter Zink | 2013-08-27 |
| 8040030 | Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus | Jeroen Jonkers | 2011-10-18 |
| 7688948 | Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology | Jeroen Jonkers | 2010-03-30 |
| 7468521 | Lithographic apparatus and device manufacturing method | Derk Jan Wilfred Klunder, Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Frank Jeroen Pieter Schuurmans, Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-12-23 |
| 7427766 | Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation | Jeroen Jonkers, Willi Neff | 2008-09-23 |
| 7323701 | Gas discharge lamp | Klaus Bergmann | 2008-01-29 |