Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8519368 | Method and device for generating EUV radiation or soft X-rays | Dominik Marcel Vaudrevange, Peter Zink | 2013-08-27 |
| 8253123 | Method and device for generating EUV radiation or soft X-rays with enhanced efficiency | Jeroen Jonkers, Felix Kuepper, Harald Ernest Verbraak | 2012-08-28 |
| 8227777 | Method and apparatus for operating an electrical discharge device | MICHAEL LOEKEN, Juergen Klein, Sven Probst | 2012-07-24 |
| 8227779 | Gas discharge source for generating EUV-radiation | — | 2012-07-24 |
| 7897948 | EUV plasma discharge lamp with conveyor belt electrodes | Jeroen Jonkers, Ralf Pruemmer | 2011-03-01 |
| 7630475 | Gas discharge source, in particular for EUV radiation | Ralf Pruemmer | 2009-12-08 |