Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589783 | Method for improving the wettability of a rotating electrode in a gas discharge lamp | Klaus Bergmann | 2017-03-07 |
| 9414476 | Method and device for generating optical radiation by means of electrically operated pulsed discharges | Ralf Conrads, Klaus Bergmann, Felix Kuepper, Jeroen Jonkers | 2016-08-09 |
| 7897948 | EUV plasma discharge lamp with conveyor belt electrodes | Jeroen Jonkers, Jakob Willi Neff | 2011-03-01 |
| 7630475 | Gas discharge source, in particular for EUV radiation | Jakob Willi Neff | 2009-12-08 |