Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12083619 | Method for selection of camera image sections | Eric Kallenbach, Sven Füßler, Sergej Scharich | 2024-09-10 |
| 9414476 | Method and device for generating optical radiation by means of electrically operated pulsed discharges | Ralf Pruemmer, Ralf Conrads, Klaus Bergmann, Felix Kuepper | 2016-08-09 |
| 8749178 | Electrode system, in particular for gas discharge light sources | Christof Metzmacher, Rolf Theo Anton Apetz | 2014-06-10 |
| 8633572 | Low ohmic through substrate interconnection for semiconductor carriers | Gereon Vogtmeier, Roger Steadman, Ralf Dorscheid | 2014-01-21 |
| 8253123 | Method and device for generating EUV radiation or soft X-rays with enhanced efficiency | Felix Kuepper, Harald Ernest Verbraak, Jakob Willi Neff | 2012-08-28 |
| 8173975 | Method and device for removing particles generated by means of a radiation source during generation of short-wave radiation | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2012-05-08 |
| 8040030 | Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus | Dominik Marcel Vaudrevange | 2011-10-18 |
| 7897948 | EUV plasma discharge lamp with conveyor belt electrodes | Jakob Willi Neff, Ralf Pruemmer | 2011-03-01 |
| 7852460 | Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans, Hugo Matthieu Visser | 2010-12-14 |
| 7688948 | Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology | Dominik Marcel Vaudrevange | 2010-03-30 |
| 7671965 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Vadim Yevgenyevich Banine | 2010-03-02 |
| 7518300 | Method and device for the generation of a plasma through electric discharge in a discharge space | Eric Gerardus Theodoor Bosch, Willi Neff, Gunther Hans Derra | 2009-04-14 |
| 7427766 | Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation | Dominik Marcel Vaudrevange, Willi Neff | 2008-09-23 |
| 7397190 | Gas discharge lamp for extreme UV radiation | Guenther Hans Derra, Joseph Pankert, Willi Neff, Klaus Bergmann | 2008-07-08 |
| 7315346 | Lithographic apparatus and device manufacturing method | Michael Cornelis Van Beek, Levinus Pieter Bakker, Theodorus Hubertus Josephus Bisschops, Mark Kroon, Robertus Adrianus Maria Wolters +1 more | 2008-01-01 |
| 7170586 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Erik Roelof Loopstra | 2007-01-30 |
| 7088424 | Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans, Hugo Matthieu Visser | 2006-08-08 |
| 7030963 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Erik Roelof Loopstra | 2006-04-18 |
| 7026629 | Lithographic apparatus and device manufacturing method | Leon Bakker, Hugo Matthieu Visser | 2006-04-11 |
| 6987275 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Antonius Johannes Josephus Van Dijsseldonk, Marcel Mathijs Theodore Marie Dierichs | 2006-01-17 |
| 6859259 | Lithographic projection apparatus and reflector assembly for use therein | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans, Hugo Matthieu Visser | 2005-02-22 |
| 6714279 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Vadim Yevgenyevich Banine | 2004-03-30 |
| 6683936 | EUV-transparent interface structure | — | 2004-01-27 |
| 6576912 | Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window | Hugo Matthieu Visser, Richard L. Sandstrom, Theodorus Hubertus Josephus Bisschops, Vadim Yevgenyevich Banine | 2003-06-10 |