| 11003096 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert |
2021-05-11 |
| 10678139 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2020-06-09 |
| 10514618 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert |
2019-12-24 |
| 10180629 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2019-01-15 |
| 10025204 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert |
2018-07-17 |
| 9568841 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert |
2017-02-14 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |
| 9316919 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert |
2016-04-19 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-10-06 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-07-14 |
| 8947637 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert |
2015-02-03 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2013-07-09 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2012-04-10 |
| 8077287 |
Method of preparing components, prepared component, lithographic apparatus and device manufacturing method |
Johannes Adrianus Antonius Theodorus Dams, Harm-Jan Voorma, Carolus Ida Maria Antonius Spee |
2011-12-13 |
| 8035798 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert |
2011-10-11 |
| 7907255 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert |
2011-03-15 |
| 7599811 |
Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus |
Frits Jurgen Van Hout, Josephus Antonius Maria Van Bommel, Peter Dirksen, Casparus Anthonius Henricus Juffermans, Renatus Maria Adrianus Mathias Van Den Eijnden |
2009-10-06 |
| 7459690 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Evert Van Der Werf, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more |
2008-12-02 |
| 7315346 |
Lithographic apparatus and device manufacturing method |
Michael Cornelis Van Beek, Levinus Pieter Bakker, Theodorus Hubertus Josephus Bisschops, Jeroen Jonkers, Robertus Adrianus Maria Wolters +1 more |
2008-01-01 |
| 7274432 |
Radiation system, lithographic apparatus, device manufacturing method, and device manufactured thereby |
— |
2007-09-25 |
| 7230674 |
Lithographic apparatus and device manufacturing method |
Michael Cornelis Van Beek, Peter Dirksen, Ralph Kurt, Cassandra Owen |
2007-06-12 |
| 7213963 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2007-05-08 |
| 7145641 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Michael Cornelis Van Beek, Peter Dirksen, Ralph Kurt, Cassandra Owen |
2006-12-05 |
| 7142287 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Michael Cornelis Van Beek, Peter Dirksen, Ralph Kurt, Cassandra Owen |
2006-11-28 |
| 7075620 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Evert Van Der Werf, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more |
2006-07-11 |
