Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7659041 | Lithographic method of manufacturing a device | Peter Dirksen, Johannes Van Wingerden | 2010-02-09 |
| 7599811 | Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus | Frits Jurgen Van Hout, Josephus Antonius Maria Van Bommel, Peter Dirksen, Mark Kroon, Renatus Maria Adrianus Mathias Van Den Eijnden | 2009-10-06 |
| 7423739 | Method of and system for determining the aberration of an imaging system test object and detector for use with the method | Peter Dirksen, Augustus Josephus Elizabeth Maria Janssen | 2008-09-09 |
| 7037626 | Lithographic method of manufacturing a device | Peter Dirksen, Johannes Van Wingerden | 2006-05-02 |
| 6960764 | Method of measuring the performance of a scanning electron microscope | Peter Dirksen, Rene Elfrink | 2005-11-01 |
| 6544694 | Method of manufacturing a device by means of a mask phase-shifting mask for use in said method | Peter Dirksen | 2003-04-08 |
| 6368763 | Method of detecting aberrations of an optical imaging system | Peter Dirksen | 2002-04-09 |
| 6331368 | Test object for use in detecting aberrations of an optical imaging system | Peter Dirksen | 2001-12-18 |
| 6291352 | Method of manufacturing a semiconductor device | Pierre Hermanus Woerlee, Andreas Hubertus Montree | 2001-09-18 |
| 6248486 | Method of detecting aberrations of an optical imaging system | Peter Dirksen | 2001-06-19 |
| 5866283 | Method of monitoring a photolithographic process through utilization of fractional radiant energy test pattern | Peter Zandbergen, Wendy Fransisca Johanna Gehoel-Van Ansem | 1999-02-02 |