Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7599811 | Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus | Josephus Antonius Maria Van Bommel, Peter Dirksen, Mark Kroon, Casparus Anthonius Henricus Juffermans, Renatus Maria Adrianus Mathias Van Den Eijnden | 2009-10-06 |
| 7068349 | Method of and preventing focal plane anomalies in the focal plane of a projection system | Ingrid Minnaert-Janssen, Johannes Jacobus Matheus Baselmans, Peter Van Oorschot, Christian Wagner, Adriaan Roelof Van Zwol +3 more | 2006-06-27 |