Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7599811 | Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus | Frits Jurgen Van Hout, Josephus Antonius Maria Van Bommel, Peter Dirksen, Mark Kroon, Casparus Anthonius Henricus Juffermans | 2009-10-06 |