Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11868291 | Data transfer system and method for transferring data in a data transfer system | Aharón Jesús Vargas Barroso | 2024-01-09 |
| 11299086 | Method for operating a lighting device in a motor vehicle | Stev Grimm, Thomas L. Vogl, Katrin Wildenhof | 2022-04-12 |
| 10742341 | Control unit, system and method for sending and receiving radio signals in several frequency ranges | — | 2020-08-11 |
| 10585116 | Scanning probe microscope and method for measuring local electrical potential fields | Frank Tautz, Ruslan Temirov, Matthew Felix Blishen Green | 2020-03-10 |
| 10470054 | Mobile communications transmission system for providing a multiplicity of mobile communications cells in a building or campus | Emilio Dragas, Andreas Lankes, Alexander Seeor, Johann Schmid | 2019-11-05 |
| 10264730 | Agricultural tool control system | Lorenz Riegger | 2019-04-23 |
| 9730058 | Method and system for producing a jammer signal | Alexander Seeor, Martin Weckerle | 2017-08-08 |
| 9516732 | Radiation source | Erik Roelof Loopstra | 2016-12-06 |
| 9134629 | Illumination system, lithographic apparatus and method of forming an illumination mode | Erik Roelof Loopstra, Koen Van Ingen Schenau, Jan Bernard Plechelmus Van Schoot, Gosse Charles De Vries | 2015-09-15 |
| 9119280 | Radiation source | Antonius Theodorus Wilhelmus Kempen, Erik Roelof Loopstra, Henricus Gerardus Tegenbosch, Gerardus Hubertus Petrus Maria Swinkels | 2015-08-25 |
| 8953141 | Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid | Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders, Rogier Hendrikus Magdalena Cortie | 2015-02-10 |
| 8901942 | System for locating and identifying at least two separate items | Immanuel Fergen, Martin Schmitt-Lewen | 2014-12-02 |
| 8901510 | Particle beam device having a detector arrangement | Dietmar Dönitz | 2014-12-02 |
| 8500435 | Positioning device | Witold Neter, Helmut Thoemmes | 2013-08-06 |
| 8405825 | Method of detecting a particle and a lithographic apparatus | Luigi Scaccabarozzi, Vadim Yevgenyevich Banine | 2013-03-26 |
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Wilhelmus Petrus De Boeij, Tilmann Heil, Damian Fiolka, Roel De Jonge | 2011-04-19 |
| 7859647 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Johannes Jacobus Matheus Baselmans, Marce Mathijs Theodore Marie Dierichs, Stanislav Smirnov, Lev Ryzhikov +1 more | 2010-12-28 |
| 7663741 | Lithographic apparatus, device manufacturing method, calibration method and computer program product | Hans Van Der Laan | 2010-02-16 |
| 7605914 | Optical system and method for improving imaging properties thereof | Thomas Stammler, Gerd Reisinger | 2009-10-20 |
| RE40743 | Projection exposure system having a reflective reticle | Gerhard Fuerter, Uwe Goedecke, Henriette Mueller | 2009-06-16 |
| 7382536 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2008-06-03 |
| 7345740 | Polarized radiation in lithographic apparatus and device manufacturing method | Wilhelmus Petrus De Boeij, Roel De Jonge, Tilmann Heil, Damian Fiolka | 2008-03-18 |
| 7317512 | Different polarization in cross-section of a radiation beam in a lithographic apparatus and device manufacturing method | Wilhelmus Petrus De Boeij | 2008-01-08 |
| 7312852 | Polarized radiation in lithographic apparatus and device manufacturing method | Wilhelmus Petrus De Boeij, Tilmann Heil, Damian Fiolka | 2007-12-25 |
| 7274430 | Optical arrangement and projection exposure system for microlithography with passive thermal compensation | Michael Trunz, Ralf Hilgers | 2007-09-25 |