| 12422758 |
Lithographic apparatus, temperature sensor, and fiber Bragg grating sensor |
Mahesh Ajgaonkar, Laurentius Johannes Adrianus Van Bokhoven, Joost André KLUGKIST, Koen Martin Willem Jan BOS |
2025-09-23 |
| 11237491 |
Reflective optical element for a radiation beam |
Ramon Mark Hofstra, Andrey Sergeevich TYCHKOV, François Deneuville, Petrus Adrianus Theodorus Maria Ruijs |
2022-02-01 |
| 10001709 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Andrei Mikhailovich Yakunin +2 more |
2018-06-19 |
| 9964852 |
Source collector apparatus, lithographic apparatus and method |
Niek Antonius Jacobus Maria Kleemans, Denis Alexandrovich Glushkov, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Christiaan Johannes Petrus Verspeek |
2018-05-08 |
| 9841680 |
Source collector apparatus, lithographic apparatus and method |
Niek Antonius Jacobus Maria Kleemans, Denis Alexandrovich Glushkov, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Christiaan Johannes Petrus Verspeek |
2017-12-12 |
| 9648714 |
Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering method |
Wilbert Jan Mestrom |
2017-05-09 |
| 9632419 |
Radiation source |
Jan Bernard Plechelmus Van Schoot, Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors +3 more |
2017-04-25 |
| 9594306 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +2 more |
2017-03-14 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen +5 more |
2016-08-09 |
| 9414477 |
Radiation source, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot |
2016-08-09 |
| 9366967 |
Radiation source |
Andrei Mikhailovich Yakunin, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Jan Bernard Plechelmus Van Schoot |
2016-06-14 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2016-06-07 |
| 9164403 |
Radiation source, lithographic apparatus and device manufacturing method |
Antonius Theodorus Wilhelmus Kempen, Richard Joseph Bruls, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Wilbert Jan Mestrom |
2015-10-20 |
| 9119280 |
Radiation source |
Antonius Theodorus Wilhelmus Kempen, Erik Roelof Loopstra, Christian Wagner, Henricus Gerardus Tegenbosch |
2015-08-25 |
| 9110377 |
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method |
Erik Roelof Loopstra, Erik Petrus Buurman, Uwe Stamm |
2015-08-18 |
| 9097982 |
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot |
2015-08-04 |
| 9091944 |
Source collector, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Sven Pekelder, Dzmitry Labetski, Uwe Stamm +1 more |
2015-07-28 |
| 9007560 |
Radiation source |
Wilbert Jan Mestrom |
2015-04-14 |
| 8946661 |
Radiation source, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors |
2015-02-03 |
| 8901521 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2014-12-02 |
| 8755032 |
Radiation source and lithographic apparatus |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Vladimir Mihailovitch Krivtsun +1 more |
2014-06-17 |
| 8749756 |
Lithographic apparatus and device manufacturing method |
Yuri Johannes Gabriël Van De Vijver, Jan Bernard Plechelmus Van Schoot, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski, Tjarko Adriaan Rudolf Van Empel |
2014-06-10 |
| 8711325 |
Method and system for determining a suppression factor of a suppression system and a lithographic apparatus |
Hendrikus Gijsbertus Schimmel, Tjarko Adriaan Rudolf Van Empel, Hans Johannes Maria Freriks, Yuri Johannes Gabriël Van De Vijver, Marc Antonius Maria Haast +3 more |
2014-04-29 |
| 8598551 |
EUV radiation source comprising a droplet accelerator and lithographic apparatus |
Wilbert Jan Mestrom, Erik Roelof Loopstra, Erik Petrus Buurman |
2013-12-03 |
| 8547525 |
EUV radiation generation apparatus |
Erik Roelof Loopstra, Uwe Stamm |
2013-10-01 |