| 12099306 |
Method for controlling a lithographic system |
Oscar Franciscus Jozephus Noordman, Jan Bernard Plechelmus Van Schoot, Marinus Aart Van Den Brink |
2024-09-24 |
| 11846887 |
Prolonging optical element lifetime in an EUV lithography system |
Yue Ma, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers, Hubertus Johannes Van De Wiel +20 more |
2023-12-19 |
| 11340532 |
Prolonging optical element lifetime in an EUV lithography system |
Yue Ma, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers, Hubertus Johannes Van De Wiel +20 more |
2022-05-24 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Ivo Vanderhallen, Nicolaas Ten Kate +6 more |
2018-05-29 |
| 9860966 |
Radiation source |
Jan Bernard Plechelmus Van Schoot, Hermanus Johannes Maria Kreuwel, Andrei Mikhailovich Yakunin |
2018-01-02 |
| 9655222 |
Radiation source |
Jeroen Van Den Akker, Adriaan Cornelis Kuijpers |
2017-05-16 |
| 9510432 |
Radiation source and lithographic apparatus |
Johan Frederik Dijksman, Wilbert Jan Mestrom |
2016-11-29 |
| 9462667 |
Radiation source and lithographic apparatus |
Johan Frederik Dijksman, Ronald Johannes Hultermans, Ramin Badie |
2016-10-04 |
| 9442380 |
Method and apparatus for generating radiation |
Ramin Badie, Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Andrei Mikhailovich Yakunin, Hendrikus Robertus Marie Van Greevenbroek +1 more |
2016-09-13 |
| 9329503 |
Multilayer mirror |
Vadim Iourievich Timoshkov, Jan Bernard Plechelmus Van Schoot, Andrei Mikhailovich Yakunin, Edgar Alberto Osorio Oliveros |
2016-05-03 |
| 9192039 |
Radiation source |
Erik Roelof Loopstra, Corne Rentrop, Dennis De Graaf, Frits Gubbels, Gregory Richard Hayes +1 more |
2015-11-17 |
| 9164403 |
Radiation source, lithographic apparatus and device manufacturing method |
Richard Joseph Bruls, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Wilbert Jan Mestrom |
2015-10-20 |
| 9119280 |
Radiation source |
Erik Roelof Loopstra, Christian Wagner, Henricus Gerardus Tegenbosch, Gerardus Hubertus Petrus Maria Swinkels |
2015-08-25 |
| 9013679 |
Collector mirror assembly and method for producing extreme ultraviolet radiation |
Dzmitry Labetski, Erik Roelof Loopstra |
2015-04-21 |
| 8890099 |
Radiation source and method for lithographic apparatus for device manufacture |
Ronald Johannes Hultermans, Bernard Van Essen |
2014-11-18 |
| 8865254 |
Method for applying a material onto a substrate using a droplet printing technique |
— |
2014-10-21 |
| 8685632 |
Radiation source, lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra |
2014-04-01 |
| 8446560 |
Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Norbertus Benedictus Koster, Erik R. Loopstra, Martin Frans Pierre Smeets |
2013-05-21 |
| 7667820 |
Method for chemical reduction of an oxidized contamination material, or reducing oxidation of a contamination material and a conditioning system for doing the same |
— |
2010-02-23 |