| 10014165 |
Radiation sensor device for high energy photons |
Diederik Jan Maas, Evert Nieuwkoop, Erwin John Van Zwet, Michel van Putten |
2018-07-03 |
| 9761458 |
Apparatus and method for reactive ion etching |
Freddy Roozeboom, Adriaan Marinus Lankhorst, Paulus Willibrordus George Poodt, Gerardus Johan Jozef Winands, Adrianus Johannes Petrus Maria Vermeer |
2017-09-12 |
| 8961694 |
Plasma generator and method for cleaning an object |
Fokko Pieter Wieringa, Roland van Vliet, Hubert Adriaan Van Mierlo |
2015-02-24 |
| 8749245 |
Ion gauge, a monitoring system and a method for determining a total integrated concentration of substances having specific molecular weight in a gas sample |
— |
2014-06-10 |
| 8480807 |
Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure |
René Koops, Kemal Agovic, Fokko Pieter Wieringa |
2013-07-09 |
| 8446560 |
Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Erik R. Loopstra, Martin Frans Pierre Smeets, Antonius Theodorus Wilhelmus Kempen |
2013-05-21 |
| 7963144 |
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system |
Richard Versluis, Bart Dinand Paarhuis |
2011-06-21 |
| 7959310 |
Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element |
Dirk Heinrich Ehm, Annemieke Van De Runstraat, Bastiaan Theodoor Wolschrijn, Arnoldus Jan Storm, Thomas Stein +8 more |
2011-06-14 |
| 7624617 |
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system |
Richard Versluis, Bart Dinand Paarhuis |
2009-12-01 |
| 7115886 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Willem Van Schaik, Bastiaan Mertens, Hans Meiling |
2006-10-03 |
| 6862075 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby |
Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine |
2005-03-01 |
| 6828569 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Willem Van Schaik, Bastiaan Mertens, Hans Meiling |
2004-12-07 |
| 6724460 |
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects |
Willem Van Schaik, Antonie Ellert Duisterwinkel, Bastiaan Mertens, Hans Meiling |
2004-04-20 |
| 6614505 |
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby |
Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine |
2003-09-02 |