| 7522263 |
Lithographic apparatus and method |
Hubert Adriaan Van Mierlo, Gert-Jan Heerens, Antonius Gerardus Theodorus Maria Bastein, Jacques Cor Johan Van Der Donck, Hedser Van Brug |
2009-04-21 |
| 7492443 |
Device manufacturing method, device manufactured thereby and a mask for use in the method |
Jan Evert Van Der Werf, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders |
2009-02-17 |
| 7248340 |
Lithographic apparatus and patterning device transport |
Erik Ham, Robert Gabriël Maria Lansbergen, Ellart Alexander Meijer, Hendricus Johannes Maria Meijer, Bastiaan Mertens +2 more |
2007-07-24 |
| 7151589 |
Lithographic apparatus and patterning device transport |
Erik Ham, Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Ellard Alexander Meijer, Hendricus Johannes Maria Meijer +2 more |
2006-12-19 |
| 7115886 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Willem Van Schaik, Bastiaan Mertens, Norbertus Benedictus Koster |
2006-10-03 |
| 7095479 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Lucas Henricus Johannes Stevens, Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors |
2006-08-22 |
| 6879374 |
Device manufacturing method, device manufactured thereby and a mask for use in the method |
Jan Evert Van Der Werf, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders |
2005-04-12 |
| 6828569 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Willem Van Schaik, Bastiaan Mertens, Norbertus Benedictus Koster |
2004-12-07 |
| 6781673 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser +4 more |
2004-08-24 |
| 6750474 |
Semiconducting devices and method of making thereof |
Rudolf Emmanuel Isidore Schropp |
2004-06-15 |
| 6724460 |
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects |
Willem Van Schaik, Antonie Ellert Duisterwinkel, Bastiaan Mertens, Norbertus Benedictus Koster |
2004-04-20 |
| 6686230 |
Semiconducting devices and method of making thereof |
Rudolf Emmanuel Isidore Schropp |
2004-02-03 |
| 5789867 |
Apparatus and method for igniting plasma in a process module |
Han Westendorp, John W. Vanderpot, Donald W. Berrian |
1998-08-04 |
| 5565036 |
Apparatus and method for igniting plasma in a process module |
Han Westendorp, John W. Vanderpot, Donald W. Berrian |
1996-10-15 |