Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10295916 | EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus | Heine Melle Mulder, Andrey Sergeevich TYCHKOV | 2019-05-21 |
| 7508487 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen, Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors +1 more | 2009-03-24 |
| 7115886 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster | 2006-10-03 |
| 6924492 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2005-08-02 |
| 6828569 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster | 2004-12-07 |
| 6825914 | System for flushing at least one internal space of an objective | Joachim Schroeder, Gerald Richter, Dieter Schmerek, Uwe Schubert, Maria Johanna Agnes Rubingh +1 more | 2004-11-30 |
| 6724460 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects | Antonie Ellert Duisterwinkel, Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster | 2004-04-20 |
| 6538716 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen | 2003-03-25 |