| 10394143 |
Topography measurement system |
Nitesh Pandey, Arie Jeffrey Den Boef, Willem Richard Pongers, Paulus Antonius Andreas Teunissen |
2019-08-27 |
| 10295916 |
EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus |
Andrey Sergeevich TYCHKOV, Willem Van Schaik |
2019-05-21 |
| 10222703 |
Lithographic apparatus and method |
Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen +2 more |
2019-03-05 |
| 9823576 |
Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method |
Dries Smeets, Arno Jan Bleeker, Christopher J. Lee, Pieter Willem Herman De Jager, Rudy Jan Maria Pellens |
2017-11-21 |
| 9778575 |
Lithographic apparatus and method |
Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen +2 more |
2017-10-03 |
| 9715183 |
Device, lithographic apparatus, method for guiding radiation and device manufacturing method |
Wouter Dick KOEK, Arno Jan Bleeker, Erik Roelof Loopstra, Erwin John Van Zwet, Dries Smeets +1 more |
2017-07-25 |
| 9651875 |
Illumination system and lithographic apparatus |
Steven George Hansen, Johannes Catharinus Hubertus Mulkens, Markus Deguenther |
2017-05-16 |
| 9563135 |
Process tuning with polarization |
Steven George Hansen, Tsann-Bim Chiou |
2017-02-07 |
| 9250536 |
Lithographic apparatus and method |
Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Greevenbroek, Patricius Aloysius Jacobus Tinnemans +2 more |
2016-02-02 |
| 9116439 |
Illumination system and lithographic apparatus |
Steven George Hansen, Johannes Catharinus Hubertus Mulkens, Markus Deguenther |
2015-08-25 |
| 8937706 |
Lithographic apparatus and method |
Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen |
2015-01-20 |
| 8896815 |
Lithographic apparatus and device manufacturing method |
— |
2014-11-25 |
| 8885144 |
Illumination system and lithographic apparatus |
Bert Claessens, Paul Van Der Veen, Wilfred Edward Endendijk, Willem Jan Bouman, Bert Pieter Van Drieënhuizen +3 more |
2014-11-11 |
| 8610878 |
Lithographic apparatus and method |
Johannes Jacobus Matheus Baselmans, Francis Fahrni, Gerardus Johannes Joseph Keijsers, Willem Richard Pongers, Joost Cyrillus Lambert Hageman +5 more |
2013-12-17 |
| 8587766 |
Lithographic apparatus and device manufacturing method |
Markus Franciscus Antonius Eurlings |
2013-11-19 |
| 8576377 |
Lithographic apparatus and device manufacturing method |
Steven George Hansen, Robert Kazinczi |
2013-11-05 |
| 8194231 |
Lithographic apparatus and method |
Joost Cyrillus Lambert Hageman, Roland Johannes Wilhelmus Stas |
2012-06-05 |
| 8089672 |
Array element device control method and apparatus |
Patricius Aloysius Jacobus Tinnemans, Marius Ravensbergen, Wilfred Edward Endendijk, Jozef Ferdinand Dymphna Verbeeck |
2012-01-03 |
| 8059266 |
Radiometric Kirk test |
David A. Hult, Minne Cuperus |
2011-11-15 |
| 8052289 |
Mirror array for lithography |
Marius Ravensbergen |
2011-11-08 |
| 7924406 |
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels |
Erik Roelof Loopstra, Arno Jan Bleeker, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more |
2011-04-12 |
| 7903234 |
Lithographic apparatus, device manufacturing method and computer program product |
Judocus Marie Dominicus Stoeldraijer, Erik Roelof Loopstra, Timotheus Franciscus Sengers, Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma +1 more |
2011-03-08 |
| 7872731 |
Lithographic apparatus and device manufacturing method |
Michel Fransois Hubert Klaassen, Hendrikus Robertus Marie Van Greevenbroek, Erik Martijn Greijdanus |
2011-01-18 |
| 7671968 |
Lithographic apparatus having masking parts and device manufacturing method |
Erik Roelof Loopstra, Arno Jan Bleeker, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more |
2010-03-02 |
| 7525641 |
System and method for uniformity correction |
Richard Carl Zimmerman, Eric Brian Catey, David A. Hult, Alexander Kremer, Hendrikus Robertus Marie Van Greevenbroek +1 more |
2009-04-28 |