Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429741 | Lithographic apparatus and a method of operating the apparatus | Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Arnout Johannes Meester +6 more | 2019-10-01 |
| 10151984 | Lithographic apparatus and a method of operating the apparatus | Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Arnout Johannes Meester +6 more | 2018-12-11 |
| 9176371 | Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure | Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Arnout Johannes Meester +6 more | 2015-11-03 |
| 7924406 | Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels | Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers +2 more | 2011-04-12 |
| 7903234 | Lithographic apparatus, device manufacturing method and computer program product | Judocus Marie Dominicus Stoeldraijer, Erik Roelof Loopstra, Heine Melle Mulder, Timotheus Franciscus Sengers, Freerk Adriaan Stoffels +1 more | 2011-03-08 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg +7 more | 2010-05-25 |
| 7671968 | Lithographic apparatus having masking parts and device manufacturing method | Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers +2 more | 2010-03-02 |
| 7580113 | Method of reducing a wave front aberration, and computer program product | Wim Tjibbo Tel, Freerk Adriaan Stoffels, Tammo Uitterdijk, Johannes Wilhelmus De Klerk | 2009-08-25 |
| 7538952 | Lithographic apparatus, aberration correction device and device manufacturing method | Tammo Uitterdijk | 2009-05-26 |
| 7372633 | Lithographic apparatus, aberration correction device and device manufacturing method | Tammo Uitterdijk | 2008-05-13 |
| 7332733 | System and method to correct for field curvature of multi lens array | Johannes Jacobus Matheus Baselmans | 2008-02-19 |
| 7239373 | Lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Johannes Jacobus Matheus Baselmans | 2007-07-03 |
| 7221430 | Lithographic apparatus and device manufacturing method | Hendrikus Alphonsus Ludovicus Van Dijck, Christian Wagner | 2007-05-22 |
| 7126672 | Lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Johannes Jacobus Matheus Baselmans | 2006-10-24 |