Issued Patents All Time
Showing 1–25 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942302 | Pulsed charged-particle beam system | Pieter Willem Herman De Jager, Maikel Robert GOOSEN, Erwin Paul SMAKMAN, Albertus Victor Gerardus MANGNUS, Yan Ren +1 more | 2024-03-26 |
| 11525786 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2022-12-13 |
| 10955353 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2021-03-23 |
| 10712667 | Optical device and associated system | Sumant Sukdew Ramanujan Oemrawsingh, Alexander Matthijs Struycken, Engelbertus Antonius Fransiscus Van Der Pasch, Bert Pieter Van Drieënhuizen | 2020-07-14 |
| 10241055 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2019-03-26 |
| 10222702 | Radiation source | Ramon Mark Hofstra, Erik Petrus Buurman, Johannes Hubertus Josephina Moors, Alexander Matthijs Struycken, Harm-Jan Voorma +3 more | 2019-03-05 |
| 9946167 | Metrology method and inspection apparatus, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Willem Marie Julia Marcel Coene, Patrick Warnaar, Michael Kubis | 2018-04-17 |
| 9823576 | Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method | Dries Smeets, Christopher J. Lee, Pieter Willem Herman De Jager, Heine Melle Mulder, Rudy Jan Maria Pellens | 2017-11-21 |
| 9715183 | Device, lithographic apparatus, method for guiding radiation and device manufacturing method | Wouter Dick KOEK, Erik Roelof Loopstra, Heine Melle Mulder, Erwin John Van Zwet, Dries Smeets +1 more | 2017-07-25 |
| 9696636 | Lithographic apparatus, device manufacturing method and computer program | Patricius Aloysius Jacobus Tinnemans, Erik Roelof Loopstra | 2017-07-04 |
| 9690210 | Lithographic apparatus and device manufacturing method | Laurentius Cornelius De Winter | 2017-06-27 |
| 9594304 | Lithography apparatus, a device manufacturing method, a method of manufacturing an attenuator | Martinus Hendricus Hoeks | 2017-03-14 |
| 9568831 | Lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans | 2017-02-14 |
| 9513561 | Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method | Martinus Hendricus Hoeks, Theodorus Petrus Maria Cadee | 2016-12-06 |
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot +9 more | 2016-11-15 |
| 9341960 | Lithographic apparatus and device manufacturing method | Antonius Johannes Josephus Van Dijsseldonk | 2016-05-17 |
| 9304077 | Inspection apparatus and method | Lucas Henricus Johannes Stevens | 2016-04-05 |
| 9176392 | Lithographic apparatus and device manufacturing method using dose control | Kars Zeger Troost | 2015-11-03 |
| 9140998 | Metrology method and inspection apparatus, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Patrick Warnaar, Willem Marie Julia Marcel Coene, Michael Kubis | 2015-09-22 |
| 8792085 | Lithographic apparatus, substrate table, and method for enhancing substrate release properties | Michiel Puyt, Rene Theodorus Petrus Compen, Rudolf Hartmut Fischer | 2014-07-29 |
| 8760662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2014-06-24 |
| 8553230 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2013-10-08 |
| 8411287 | Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate | Hendrik Jan Hidde Smilde, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Henricus Petrus Maria Pellemans, Reinder Teun Plug +1 more | 2013-04-02 |
| 8189172 | Lithographic apparatus and method | Johannes Jacobus Matheus Baselmans | 2012-05-29 |
| 8159647 | Lithographic apparatus and device manufacturing method | Dominicus Jacobus Petrus Adrianus Franken, Peter Kochersperger, Kars Zeger Troost | 2012-04-17 |