Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815808 | Method for high numerical aperture thru-slit source mask optimization | Eelco Van Setten, Duan-Fu Stephen Hsu | 2023-11-14 |
| 9958788 | Method of operating a patterning device and lithographic apparatus | Vitaliy Prosyentsov, Willem Jurrianus Venema, Adrianus Martinus Van Der Wielen | 2018-05-01 |
| 9568833 | Method of operating a patterning device and lithographic apparatus | Vitaliy Prosyentsov, Willem Jurrianus Venema, Adrianus Martinus Van Der Wielen | 2017-02-14 |
| 9417533 | Method of operating a patterning device and lithographic apparatus | Vitaliy Prosyentsov, Willem Jurrianus Venema, Adrianus Martinus Van Der Wielen | 2016-08-16 |
| 9176392 | Lithographic apparatus and device manufacturing method using dose control | Arno Jan Bleeker | 2015-11-03 |
| 8264667 | Lithographic apparatus and device manufacturing method using interferometric and other exposure | Johannes Jacobus Matheus Baselmans, James Greeneich | 2012-09-11 |
| 8259285 | Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data | Jason Hintersteiner, Patricius Aloysius Jacobus Tinnemans, Wenceslao A. Cebuhar, Ronald Peter Albright, Bernardo Kastrup | 2012-09-04 |
| 8159647 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Dominicus Jacobus Petrus Adrianus Franken, Peter Kochersperger | 2012-04-17 |
| 8009269 | Optimal rasterization for maskless lithography | Jason Hintersteiner, Minne Cuperus, Kamen Hristov Chilov, Richard Carl Zimmerman, Ronnie Florentius Van T Westeinde | 2011-08-30 |
| 7965380 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2011-06-21 |
| 7859647 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Johannes Jacobus Matheus Baselmans, Marce Mathijs Theodore Marie Dierichs, Stanislav Smirnov, Christian Wagner +1 more | 2010-12-28 |
| 7728956 | Lithographic apparatus and device manufacturing method utilizing multiple die designs on a substrate using a data buffer that stores pattern variation data | Arno Jan Bleeker, Adrianus Johannes Henricus Maas | 2010-06-01 |
| 7713667 | System and method for generating pattern data used to control a pattern generator | Azat Latypov, Arno Jan Bleeker, Jang Fung Chen | 2010-05-11 |
| 7679715 | Lithographic processing cell, lithographic apparatus, track and device manufacturing method | Stefan Geerte Kruijswijk, Rard Willem De Leeuw, Paul Frank Luehrmann, Wim Tjibbo Tel, Paul Jacques Van Wijnen | 2010-03-16 |
| 7548302 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Donis Flagello, Robert John Socha, James Greeneich | 2009-06-16 |
| 7538855 | Lithographic apparatus and device manufacturing method | Johan Christiaan Gerard Hoefnagels, Pieter Willem Herman De Jager | 2009-05-26 |
| 7500218 | Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same | Johannes Jacobus Matheus Baselmans, Karel Diederick Van Der Mast | 2009-03-03 |
| 7499146 | Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping | Johannes Jacobus Matheus Baselmans, Arno Jan Bleeker, Louis John Markoya, Neal Callan, Nicholas K. Eib | 2009-03-03 |
| 7466394 | Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array | Johannes Jacobus Matheus Baselmans | 2008-12-16 |
| 7440078 | Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units | Arno Jan Bleeker | 2008-10-21 |
| 7411652 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Dominicus Jacobus Petrus Adrianus Franken, Peter Kochersperger | 2008-08-12 |
| 7403259 | Lithographic processing cell, lithographic apparatus, track and device manufacturing method | Stefan Geerte Kruijswijk, Rard Willem De Leeuw, Paul Frank Luehrmann, Wim Tjibbo Tel, Paul Jacques Van Wijnen | 2008-07-22 |
| 7400382 | Light patterning device using tilting mirrors in a superpixel form | Nabila Baba-Ali, Arno Jan Bleeker | 2008-07-15 |
| 7362415 | Lithographic apparatus and device manufacturing method | Dominicus Jacobus Petrus Adrianus Franken, Arno Jano Bleeker, Wilhelmus Josephus Box, Martinus Hendricus Hoeks, Henricus Gerardus Tegenbosch +1 more | 2008-04-22 |
| 7349068 | Lithographic apparatus and device manufacturing method | Karel Diederick Van Der Mast | 2008-03-25 |