| 8908144 |
Lithographic apparatus and device manufacturing method |
Rogier Herman Mathijs Groeneveld, Antonius Johannes Josephus Van Dijsseldonk, Bastiaan Stephanus Hendricus Jansen, Robertus Johannes Marinus De Jongh, Marc Wilhelmus Maria Van Der Wijst +1 more |
2014-12-09 |
| 8159647 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Peter Kochersperger, Kars Zeger Troost |
2012-04-17 |
| 7999914 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Erik Roelof Loopstra, Marius Ravensbergen |
2011-08-16 |
| 7804584 |
Integrated circuit manufacturing methods with patterning device position determination |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Bernardus Antonius Johannes Luttikhuis, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst +1 more |
2010-09-28 |
| 7554105 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Pertrus Bartray, Marc Wilhelmus Maria Van Der Wijst, Michael Jozef Mathijs Renkens, Gerard Van Schothorst +1 more |
2009-06-30 |
| 7525637 |
Assembly |
— |
2009-04-28 |
| 7508494 |
Lithographic apparatus and a subtrate table for exciting a shockwave in a substrate |
Arno Jan Bleeker, Johannes Hendrikus Gertrudis Franssen, Johannes Theodorus Guillielmus Maria Van De Ven, Michiel Puyt, Teun Peterus Adrianus De Wilt |
2009-03-24 |
| 7474384 |
Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatus |
Arno Jan Bleeker, Stephen Roux, Michael L. Nelson |
2009-01-06 |
| 7474378 |
Assembly, a lithographic apparatus, and a device manufacturing method |
— |
2009-01-06 |
| 7471373 |
Lithographic apparatus with patterning device position determination |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Bernardus Antonius Johannes Luttikhuis, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst +1 more |
2008-12-30 |
| 7460208 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Martinus Hendricus Hoeks, Lambertus Gerardus Maria Kessels, Tobrjörn Sandström |
2008-12-02 |
| 7436484 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Erik Roelof Loopstra, Marius Ravensbergen |
2008-10-14 |
| 7411652 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Peter Kochersperger, Kars Zeger Troost |
2008-08-12 |
| 7397531 |
Lithographic apparatus and device manufacturing method |
— |
2008-07-08 |
| 7362415 |
Lithographic apparatus and device manufacturing method |
Arno Jano Bleeker, Wilhelmus Josephus Box, Martinus Hendricus Hoeks, Henricus Gerardus Tegenbosch, Kars Zeger Troost +1 more |
2008-04-22 |
| 7307262 |
Lithographic apparatus and device manufacturing method |
Antonius Johannes Josephus Van Dijsseldonk, Robertus Johannes Marinus De Jongh, Jacob Kleijn, Bastiaan Stephanus Hendricus Jansen, Marc Wilhelmus Maria Van Der Wijst |
2007-12-11 |
| 7161658 |
Lithographic apparatus and device manufacturing method |
— |
2007-01-09 |
| 7151588 |
Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus |
Wilhelmus Josephus Box |
2006-12-19 |
| 7126671 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Nicolaas Rudolf Kemper, Engelbertus Antonius Fransiscus Van Der Pasch, Martijn Johannes Verbunt, Lambertus Adrianus Van Den Wildenberg |
2006-10-24 |
| 7116399 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Wilhelmus Josephus Box, Antonius Johannes Josephus Van Dijsseldonk, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Josephus Jacobus Smits +1 more |
2006-10-03 |
| 7110083 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra |
2006-09-19 |
| 7049592 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Pertrus Bartray, Marc Wilhelmus Maria Van Der Wijst, Michael J. M. Renkens, Gerard Van Schothorst +1 more |
2006-05-23 |
| 7035056 |
Piezoelectric actuator and a lithographic apparatus and a device manufacturing method |
Bastiaan Stephanus Hendricus Jansen |
2006-04-25 |
| 6967756 |
Lithographic apparatus device manufacturing method and device manufactured thereby |
Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra |
2005-11-22 |
| 6788386 |
Lithographic apparatus and device manufacturing method |
Hendrikus Herman Marie Cox, Frank Auer, Marc Wilhelmus Maria Van Der Wijst, Bastiaan Stephanus Hendricus Jansen |
2004-09-07 |
