| 11150560 |
Projection system and mirror and radiation source for a lithographic apparatus |
Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Koen Jacobus Johannes Maria Zaal |
2021-10-19 |
| 10732511 |
Projection system and mirror and radiation source for a lithographic apparatus |
Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Koen Jacobus Johannes Maria Zaal |
2020-08-04 |
| 10649347 |
Lithographic apparatus and device manufacturing method |
Michaël Johannes Christiaan RONDE, Lucas KUINDERSMA, Niels Johannes Maria Bosch, Hans Butler, Cornelius Adrianus Lambertus De Hoon +2 more |
2020-05-12 |
| 10551751 |
Lithography apparatus and device manufacturing method |
Hans Butler |
2020-02-04 |
| 10409175 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Thijs Verhees, Sander Kerssemakers |
2019-09-10 |
| 10216093 |
Projection system and minor and radiation source for a lithographic apparatus |
Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Koen Jacobus Johannes Maria Zaal |
2019-02-26 |
| 10191393 |
Lithographic apparatus, and device manufacturing method |
Jan Steven Christiaan Westerlaken, Marcel Koenraad Marie Baggen, Fransiscus Mathijs Jacobs, Jeroen Arnoldus Leonardus Johannes Raaymakers, Frank Pieter Albert Van Den Berkmortel |
2019-01-29 |
| 10146133 |
Lithographic apparatus and method |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Hubertus Petrus Leonardus Henrica VAN BUSSEL, Arij Jonathan Rijke, Mathijs Leonardus Johan Verhees |
2018-12-04 |
| 10114299 |
Lithographic apparatus |
Günes NAKIBOGLU, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers +6 more |
2018-10-30 |
| 9715171 |
Imprint lithographic apparatus and imprint lithographic method |
Hans Butler, Johannes Petrus Martinus Bernardus Vermeulen, Jeroen Pieter Starreveld, Cornelius Adrianus Lambertus De Hoon, Francois Xavier Debiesme |
2017-07-25 |
| 9696630 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Erik Roelof Loopstra, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis, Rodolfo Guglielmi Rabe +2 more |
2017-07-04 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more |
2016-11-15 |
| 9378722 |
Lithographic apparatus with actuator to compensate acoustic vibration |
Hans Butler, Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos, Joost De Pee +5 more |
2016-06-28 |
| 9134632 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Yim-Bun Patrick Kwan, Erik Roelof Loopstra, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis +2 more |
2015-09-15 |
| 9122173 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens +4 more |
2015-09-01 |
| 8994919 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon |
2015-03-31 |
| 8908144 |
Lithographic apparatus and device manufacturing method |
Rogier Herman Mathijs Groeneveld, Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Bastiaan Stephanus Hendricus Jansen, Robertus Johannes Marinus De Jongh +1 more |
2014-12-09 |
| 8781775 |
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus |
Hans Butler, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot +2 more |
2014-07-15 |
| 8619232 |
Method for damping an object, an active damping system, and a lithographic apparatus |
Hans Butler |
2013-12-31 |
| 8553199 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Johan Geerke, Joost De Pee, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis +1 more |
2013-10-08 |
| 8493553 |
Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame |
Hans Butler, Martinus Van Duijnhoven |
2013-07-23 |
| 8457385 |
Measurement system and lithographic apparatus for measuring a position dependent signal of a movable object |
Engelbertus Antonius Fransiscus Van Der Pasch, Koen Jacobus Johannes Maria Zaal |
2013-06-04 |
| 8368868 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless |
Johannes Petrus Martinus Bernardus Vermeulen, Marcel Koenraad Marie Baggen, Hans Butler, Henrikus Herman Marie Cox, Jan Van Eijk +7 more |
2013-02-05 |
| 8245824 |
Combination of structure and an active damping system, and a lithographic apparatus |
Hans Butler, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker |
2012-08-21 |
| 8248583 |
Lithographic apparatus and calibration method |
Marinus Aart Van Den Brink, Hans Butler, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Georgo Angelis +4 more |
2012-08-21 |