| 10578959 |
Support apparatus, lithographic apparatus and device manufacturing method |
Gijs Kramer, Simon Karel RAVENSBERGEN, Niek Jacobus Johannes Roset |
2020-03-03 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Arno Jan Bleeker, Martinus Hendricus Hoeks, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot +9 more |
2016-11-15 |
| 9136151 |
Actuator |
Fredrik Wilhelm Van Der Blij, Edwin Johan Buis, Johannes Charles Adrianus Van Den Berg, Johannes Andreas Henricus Maria Jacobs |
2015-09-15 |
| 8860926 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Patrick Johannes Cornelus Hendrik Smulders, Peter Smits |
2014-10-14 |
| 8115905 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Patrick Johannes Cornelus Hendrik Smulders, Peter Smits |
2012-02-14 |
| 7791709 |
Substrate support and lithographic process |
Frits Van Der Meulen, Joost Jeroen Ottens, Peter Paul Steijaert, Hubert Matthieu Richard Steijns, Peter Smits |
2010-09-07 |
| 7405810 |
Method and apparatus for positioning a substrate on a substrate table |
Jacob Willem Vink |
2008-07-29 |
| 7397539 |
Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof |
Marcus J. H. Willems van Dijk |
2008-07-08 |
| 7365827 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Patrick Johannes Cornelus Hendrik Smulders, Peter Smits |
2008-04-29 |
| 7123349 |
Lithographic projection assembly, substrate handling apparatus and substrate handling method |
Pieter Johannes Marius Van Groos, Jan Frederik Hoogkamp, Albert Jan Hendrik Klomp, Johannes Onvlee, Raimond Visser |
2006-10-17 |