Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139436 | Droplet generator nozzle | Dietmar Uwe Herbert Trees, Theodorus Wilhelmus Driessen, Benjamin Andrew Sams, Brandon Michael Johnson | 2024-11-12 |
| 9785051 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Sven Antoin Johan Hol, Erik Maria Rekkers, Gosse Charles De Vries, Hako Botma +2 more | 2017-10-10 |
| 9651772 | Arrangement for the actuation of at least one element in an optical system | Markus Hauf, Martin Latzel | 2017-05-16 |
| 9494878 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Gosse Charles De Vries, Sven Antoin Johan Hol, Erik Maria Rekkers | 2016-11-15 |
| 9172294 | Planar motor and lithographic apparatus comprising such planar motor | Sven Antoin Johan Hol, Erwin Wijn | 2015-10-27 |
| 9136151 | Actuator | Fredrik Wilhelm Van Der Blij, Pieter Renaat Maria Hennus, Johannes Charles Adrianus Van Den Berg, Johannes Andreas Henricus Maria Jacobs | 2015-09-15 |
| 8867021 | Illumination system, lithographic apparatus and method of adjusting an illumination mode | Gosse Charles De Vries, Marinus Johannes Maria Van Dam, Jan Bernard Plechelmus Van Schoot, Fidelus Adrianus Boon, Hermanus Johannes Maria Kreuwel | 2014-10-21 |
| 8817232 | Optical apparatus, and method of orienting a reflective element | Gosse Charles De Vries, Fidelus Adrianus Boon | 2014-08-26 |
| 8757823 | Mountings for rotation of array of reflective elements and lithographic apparatus incorporating same | Gosse Charles De Vries | 2014-06-24 |
| 8724081 | Lithographic apparatus and method | Gosse Charles De Vries | 2014-05-13 |
| 8634062 | Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing method | Gosse Charles De Vries, Uwe Mickan | 2014-01-21 |
| 8279408 | Object support positioning device and lithographic apparatus | — | 2012-10-02 |
| 7700930 | Lithographic apparatus with rotation filter device | Tjarko Adriaan Rudolf Van Empel | 2010-04-20 |
| 7629593 | Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method | Vadim Yevgenyevich Banine, Tjarko Adriaan Rudolf Van Empel, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer | 2009-12-08 |
| 7602472 | Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device | Erik Theodorus Maria Bijlaart, Christiaan Alexander Hoogendam, Alexander Matthijs Struycken, Arnoud Cornelis Wassink, Paul Peter Anna Antonius Brom | 2009-10-13 |
| 7518705 | Lithographic apparatus and device manufacturing method | Antonie Hendrik Verweij, Hans Butler | 2009-04-14 |
| 7492440 | Lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Henrikus Herman Marie Cox, Noud Jan Gilissen, Harmen Klaas Van Der Schoot | 2009-02-17 |
| 7486384 | Lithographic support structure | Patricius Aloysius Jacobus Tinnemans, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Jan Frederik Hoogkamp, Aschwin Lodewijk Hendricus Johannes Van Meer +8 more | 2009-02-03 |
| 7307689 | Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing | Maurice Philippe Du Mee, Johannes Adrianus Antonius Theodorus Dams, Johannes Andreas Henricus Maria Jacobs, Antoine Hendrik Verweij, Erik Maria Rekkers | 2007-12-11 |
| 7224429 | Lithographic apparatus, device manufacturing method and positioning system | Sven Antoin Johan Hol, Patricia Vreugdewater | 2007-05-29 |
| 7088428 | Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method | Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot, Patricia Vreugdewater | 2006-08-08 |
| 7057313 | Cooling of voice coil motors | Noud Jan Gilissen, Yim-Bun Patrick Kwan, Paulus Schapendonk | 2006-06-06 |
| 6937316 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Nicolaas Rudolf Kemper, Hernes Jacobs | 2005-08-30 |
| 6831285 | Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby | Sven Antoin Johan Hol, Robrecht De Weerdt | 2004-12-14 |
| 6657204 | Cooling of voice coil motors in lithographic projection apparatus | Noud Jan Gilissen, Yim-Bun Patrick Kwan, Paulus Schapendonk | 2003-12-02 |