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Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +20 more |
2022-07-05 |
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Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +20 more |
2020-11-17 |
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Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +20 more |
2019-04-09 |
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Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker |
2011-02-22 |
| 7639345 |
Lithographic apparatus |
Joost Jeroen Ottens, Wim Tjibbo Tel, Jacob Willem Vink, Rene Theodorus Petrus Compen, Petrus Johannes Gerrits |
2009-12-29 |
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Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck |
Jeroen Johannes Sophia Maria Mertens, Joost Jeroen Ottens, Edwin Augustinus Matheus Van Gompel |
2009-05-12 |
| 7486384 |
Lithographic support structure |
Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Jan Frederik Hoogkamp +8 more |
2009-02-03 |
| 7327438 |
Lithographic apparatus and method of a manufacturing device |
Koen Jacobus Johannes Maria Zaal, Tjarko Adriaan Rudolf Van Empel, Jan Rein Miedema, Joost Jeroen Ottens |
2008-02-05 |
| 7304715 |
Lithographic apparatus and device manufacturing method |
Theodorus Petrus Maria Cadee, Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Koen Goorman +6 more |
2007-12-04 |
| 7133120 |
Lithographic apparatus, article support member, and method |
Koen Jacobus Johannes Maria Zaal, Joost Jeroen Ottens |
2006-11-07 |
| 7119885 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Tjarko Adriaan Rudolf Van Empel, Jan Rein Miedema, Koen Jacobus Johannes Maria Zaal |
2006-10-10 |
| 7113262 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Tjarko Adriaan Rudolf Van Empel, Koen Jacobus Johannes Maria Zaal, Ton Aantjes |
2006-09-26 |
| 6856376 |
Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby |
Gert-Jan Heerens, Sjoerd Nicolaas Lambertus Donders, Franciscus Andreas Cornelis Johannes Spanjers, Thomas Josephus Maria Castenmiller |
2005-02-15 |
| 6392738 |
Lithographic projection apparatus |
Engelbertus A. F. van de Pasch, Franciscus Adrianus Gerardus Klaassen |
2002-05-21 |