Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8235212 | Mask transport system configured to transport a mask into and out of a lithographic apparatus | — | 2012-08-07 |
| 7839489 | Assembly of a reticle holder and a reticle | Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2010-11-23 |
| 7781237 | Alignment marker and lithographic apparatus and device manufacturing method using the same | Anastasius Jacobus Anicetus Bruinsma, Jacob Klinkhamer, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Hubert Adriaan Van Mierlo, Willem Vliegenthart | 2010-08-24 |
| 7522263 | Lithographic apparatus and method | Hubert Adriaan Van Mierlo, Hans Meiling, Antonius Gerardus Theodorus Maria Bastein, Jacques Cor Johan Van Der Donck, Hedser Van Brug | 2009-04-21 |
| 7466397 | Safety mechanism for a lithographic patterning device | Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2008-12-16 |
| 7423733 | Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra | 2008-09-09 |
| 7361911 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Robertus Nicodemus Jacobus Van Ballegoij, Vadim Yevgenyevich Banine, Frederik T. E. Heuts, Johannes Henricus Wilhelmus Jacobs +2 more | 2008-04-22 |
| 7306680 | Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus | — | 2007-12-11 |
| 7248340 | Lithographic apparatus and patterning device transport | Erik Ham, Robert Gabriël Maria Lansbergen, Ellart Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling +2 more | 2007-07-24 |
| 7236233 | Assembly of a reticle holder and a reticle | Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2007-06-26 |
| 7202934 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Erik Ham, Paulus Martinus Maria Liebregts, Erik Roelof Loopstra, Henri Gerard Cato Werij | 2007-04-10 |
| 7151589 | Lithographic apparatus and patterning device transport | Erik Ham, Robert Gabriël Maria Lansbergen, Ellard Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling +2 more | 2006-12-19 |
| 7119346 | Lithographic apparatus and device manufacturing method | Hendrik Antony Johannes Neerhof | 2006-10-10 |
| 7084961 | Safety mechanism for a lithographic patterning device | Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2006-08-01 |
| 7053980 | Lithographic alignment system | Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2006-05-30 |
| 6856376 | Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby | Sjoerd Nicolaas Lambertus Donders, Franciscus Andreas Cornelis Johannes Spanjers, Aschwin Lodewijk Hendricus Johannes Van Meer, Thomas Josephus Maria Castenmiller | 2005-02-15 |
| 6753945 | Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Robert Gabriël Maria Lansbergen, Erik Ham | 2004-06-22 |