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Vessel for a radiation source |
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Radioisotope production |
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2021-11-09 |
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Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
2021-05-18 |
| 11003098 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
2021-05-11 |
| 10969701 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
2021-04-06 |
| 10558129 |
Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
2020-02-11 |
| 10539886 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
2020-01-21 |
| 9983487 |
Rapid exchange device for lithography reticles |
George Hilary Harrold, Richard J. Johnson, Hugo Jacobus Gerardus Van Der Weijden |
2018-05-29 |
| 9669984 |
Lithographic apparatus and device manufacturing method |
Peter Kochersperger, David Ramirez |
2017-06-06 |
| 9457947 |
Lithographic apparatus and device manufacturing method |
Peter Kochersperger, David Ramirez, Xugang Xiong, George Hilary Harrold, Arindam Sinharoy |
2016-10-04 |
| 9268241 |
Rapid exchange device for lithography reticles |
George Hilary Harrold, Richard J. Johnson, Hugo Jacobus Gerardus Van Der Weijden |
2016-02-23 |
| 8614786 |
Robot for in-vacuum use |
George Hilary Harrold, Matthew J. Van Doren |
2013-12-24 |
| 7423733 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Gert-Jan Heerens, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra |
2008-09-09 |
| 7248340 |
Lithographic apparatus and patterning device transport |
Erik Ham, Ellart Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling, Bastiaan Mertens +2 more |
2007-07-24 |
| 7151589 |
Lithographic apparatus and patterning device transport |
Erik Ham, Gert-Jan Heerens, Ellard Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling +2 more |
2006-12-19 |
| 6753945 |
Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method |
Gert-Jan Heerens, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Erik Ham |
2004-06-22 |