Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9983487 | Rapid exchange device for lithography reticles | Robert Gabriël Maria Lansbergen, Richard J. Johnson, Hugo Jacobus Gerardus Van Der Weijden | 2018-05-29 |
| 9457947 | Lithographic apparatus and device manufacturing method | Robert Gabriël Maria Lansbergen, Peter Kochersperger, David Ramirez, Xugang Xiong, Arindam Sinharoy | 2016-10-04 |
| 9268241 | Rapid exchange device for lithography reticles | Robert Gabriël Maria Lansbergen, Richard J. Johnson, Hugo Jacobus Gerardus Van Der Weijden | 2016-02-23 |
| 8614786 | Robot for in-vacuum use | Robert Gabriël Maria Lansbergen, Matthew J. Van Doren | 2013-12-24 |
| 7619718 | Method and system for active purging of pellicle volumes | Florence Luo, Herman Vogel, Nicolaas Ten Kate | 2009-11-17 |